Used RORZE EFEM #9255471 for sale

RORZE EFEM is a next-generation wafer handling platform designed for semiconductor processing. It combines state-of-the-art components, high-end automation and versatile control functions to provide an outstanding user experience. EFEM system includes a loading/unloading stage, a wafer stage, and a transfer stage. The loading/unloading stage has two motors located near each end of the table, allowing for efficient and accurate transport of the wafers from the storage carriers. It also features position sensors that detect the presence of wafers and a vision system for enhanced performance. The wafer stage consists of a precision motor with a rotary solenoid for controlling the drive spindle and a chuck to hold the wafers. It is capable of high-speed rotation and vibration, and can accommodate up to 8 wafers at a time. The transfer stage contains two claw units that are capable of transferring wafers from one stage to the other quickly and accurately. In addition, RORZE EFEM also includes a set of sophisticated control functions. It features an intuitive and easy-to-use user interface, with a graphical display providing real-time information on wafer position and status. It also includes PID control, allowing the user to set specific target values for the speed, pressure, and torque of the wafer stages and transfer stages. The system can be programmed with a variety of commands and parameters for optimal performance, and can store up to 30 configurations. Finally, EFEM is designed for secure operation with safety and reliability in mind. It features multiple safety systems, including a door switch, safety rope, and wafer-detection sensors. It has also been designed to minimize vibration and prevent damage to the wafers. RORZE EFEM provides outstanding performance in wafer handling, offering a superior level of automation for efficient semiconductor processing. It combines state-of-the-art components with sophisticated control functions, providing an easy-to-use and secure operation for a highly advanced user experience.