Used RORZE RR717L1521-3A6-231-2 #9206455 for sale

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ID: 9206455
Vintage: 2004
Robot 2004 vintage.
RORZE RR717L1521-3A6-231-2 is a semi-automatic wafer handler that specializes in the transport of up to 600mm 300mm wafers. It is designed for use in clean rooms and other high-purity air environments in the semiconductor industry. At its core, RR717L1521-3A6-231-2 contains an integrated mechanical equipment which is responsible for wafer handling and transport with precise movement, orientation, and speed, and an automated electrical control system for operating functions. The mechanical unit is composed of two linear lifters, one vertical lifter, one horizontal lifter, two XYZ axis stages, and two end-effector arms. This assembly is encased in a stainless steel frame, providing a sturdy and reliable transport apparatus. The linear lifters are responsible for transferring wafers up to a height of 600mm, while the vertical lifter caters to the lower heights an end-effector must traverse. They are driven by three stepping-motor drivers. The XYZ axis stages, driven by rotary motors, provide the precise movement and orientation of the end-effector, both during transport and picking/placing of wafers. The end-effector arms, programmed for individual functions, allow for up to two wafers to be picked/placed simultaneously. The electrical machine of RORZE RR717L1521-3A6-231-2 consists of an X-Y Table, a PC-based Controller, and an EMPROM. The X-Y Tablein combination with the PC-based controller automates data transfer and wafer handling by providing an open-source programming tool. The PC-based controller controls and monitors all the operations, recording data and status signals related to asset performance. It is also responsible for automatic error correction and flow control. The EMPROM assists in the fine-tuning of parameters related to the motion profile. The modular design of RR717L1521-3A6-231-2 allows for easy installation and service. The model is supported by both an interlock and a safety lock-out equipment which protect people and equipment against misuse. It is CE compliant, contains FOUP detection, and can communicate via interfaces such as ESS, SPC, and GEM. Weighing in at 400kg, RORZE RR717L1521-3A6-231-2 is a proven and reliable wafer handler designed to help increase productivity during semiconductor production. It provides automatic, stable, and precise automation of up to 600mm 300mm wafers in clean rooms over large areas. The versatile system, thanks to its integrated control unit, is an ideal solution for many applications in both the semiconductor manufacturing and high-tech industry.
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