Used RUDOLPH / AUGUST WHS 300MM #9401134 for sale

ID: 9401134
Wafer handler.
RUDOLPH / AUGUST WHS 300MM Wafer Handler (WHS) is a robotic pick-and-place handler designed for manufacturing of ultra-large-scale integrated (ULSI) circuits. This wide range of handler can transport 300 millimeter wafers from one processing station to the next, allowing for efficient and precise production of high quality products. The WHS features a dual robot arm which is capable of operating in a 3-axis configuration, allowing for precise motion control. The robotic arm features two independent motors, allowing for two-step processing of wafers, including the option to rotate them for facing processing within one station. The WHS is equipped with the latest vacuum and pressure sensors, giving absolute accuracy in placement and movement. Its wide array of advanced software options enables precise and repeatable handling of all kinds of wafers. The WHS is able to recognize and handle wafer thicknesses as small as 200 microns and as high as 1.2 millimeters. This allows for repeatable placement accuracy, reducing cost and wastage due to misplacement at any given point. The WHS features an intuitive interface, allowing for program retrieval and modification without any disconnection from the system. This feature also allows for real-time control of production, allowing for statistical control sites to give instructions without interference from the user. The system is further designed to work with standard ULSI equipment, such as LDIE and NIE. The WHS measures 441 x 672 x 953 mm and weighs 750kg, making it compatible with the majority of production facilities. The size is designed to ensure maximum productivity, while still taking into account the ergonomics of the operators. The WHS is highly reliable and efficient and can operate continuously, free from problems even in the harshest working environment. The WHS is designed to hold up to 50 wafers and boasts a processing speed of up to 160 wafers per hour. Extensive design features ensure accuracy and optimal performance at all times, meaning the production yield will not be compromised. In addition, the WHS comes with a built-in safety system, allowing the operator to comfortably monitor the operations and to easily intervene if required. AUGUST WHS 300MM Wafer Handler is an essential piece of equipment for modern production lines, as it efficiently transports ULSI wafers from one station to the next, guiding them through each step of the manufacturing process with absolute precision. Its features make it an invaluable asset for any production house that requires high quality and exacting standards.
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