Used SANKYO SR8240-0002CCR #9296842 for sale

SANKYO SR8240-0002CCR is an advanced wafer handler machine that is designed for high-precision process and handling needs. It is equipped with a two-axis X-Y-Z motion equipment, a load transport system, and a vacuum chuck for handling wafers up to 200mm. The two-axis X-Y-Z motion unit consists of two linear axes X and Y that are capable of continuous movement with a resolution of ± 0.01mm. The motion machine also includes the K-axis, which is capable of 180° rotation to better position and hold wafers. The vacuum chuck features an embedded brushless DC motor that control the precision of the wafer chuck-out force, and the chuck can hold and release wafers with a large capacity up to 200mm with force feedback. SR8240-0002CCR also features a load transport tool that consists of a mechanical shuttle arm mounted to the linear X-Y motion stage, and several components to transport and support the wafers as they move between positions. The shuttle asset can be used for infeed and outfeed of wafers, ensuring precision handling and placement of the wafers. This machine is designed to ensure safety and reliability for a variety of process and handling needs. To ensure safety, the machine is equipped with a safety interlock model that is triggered when the wafer handling equipment is not in the correct operating position. In addition, the machine is equipped with an Anti-Affinity System (AAS) to monitor and prevent unexpected movement of the operating components, during machine setup, operation, and maintenance. Overall, SANKYO SR8240-0002CCR is a versatile and reliable wafer handler that provides precise process and handling capabilities. Its two-axis X-Y-Z motion unit and load transport machine allow it to handle large wafers with speed and accuracy, while its safety and monitoring systems ensure safe and reliable operation.