Used SHIBUYA EH 182 #293585948 for sale

SHIBUYA EH 182 is a high-performance wafer handler designed for the automated loading and unloading of semiconductor wafers. It is used primarily in semiconductor manufacturing processes to transfer wafer cassettes or front open cassettes (FOC) into and out of process areas such as etchers, diffusion furnaces and photo lithography chambers. EH 182 has a FOC capability of 8-inch, 200 mm and 300 mm wafers and can handle up to 8 cassettes at a time. SHIBUYA EH 182 consists of several major components, including a robotic arm, a set of lifting motors and a set of bearing gears. The robotic arm is designed to transfer the cassettes from a buffer to the robot and the left motors are designed to lift the robotic arm. The bearing gears are used for smooth robotic movements during handling of the cassettes. EH 182 is configured with three different transfer types: clamshell, front-open and round shuttle. The clamshell transfer allows SHIBUYA EH 182 to accurately place the wafer and its substrates in the internal processing chambers, while the front-open transfer takes cassettes back and forth between the chambers. The round shuttle transfer is used to transport cassettes between tools and allows for multiple routing paths and simultaneous movement of more than one cassette. In addition to the transfer capabilities, EH 182 also offers advanced vision capability to check for any defects during the wafer pick-up and placement steps. This feature allows for further protection against any potential damages. SHIBUYA EH 182 is equipped with user-friendly features to facilitate the automation process, such as easy setup and manual commands. Its built-in intelligence enables EH 182 to react in an appropriate manner to a task with minimal user interface. SHIBUYA EH 182 is a reliable and high-performance wafer handler that provides smooth, accurate and repeatable robotic motion. Its advanced features and customization capabilities make it ideal for both automated and manual environments. Combined with its cost-efficient design, EH 182 is the ideal solution for semiconductor handling requirements.