Used SHIBUYA EH 182 #9283295 for sale

SHIBUYA EH 182 is a wafer handler manufactured by SHIBUYA Corporation and designed for use in the semiconductor and wafer fabrication industry. It is a four-junction, four-axis wafer handler that is built from lightweight and durable aluminum alloy. It is designed to transport and align up to four different wafers simultaneously, making it an ideal choice for efficient production and throughput. The four separate wafer sites, marked A / B / C / D, each have their own independent sensor and associated digital output. Each one is affixed with a precise, high-resolution optical encoder and laser micrometer, allowing for precise wafer location and positioning. The sensors are capable of detecting objects from 2 mm to 8 mm in size, and have a linear accuracy of less than 1 µm. The machine is equipped with a high-powered, multi-axis 4-DOF robotic arm, allowing for fast and effective motion control. It offers a total travel range of 50° in both the X and Y directions, and ±95° in the Z axis. A pulse motor and several integrated limit switches allow for optimized speed and precision, and a wide range of specialized wafer-handling accessories can be fitted to the robot arm to ensure the best possible performance. EH 182 is a robust, high-performance machine designed to accommodate a variety of wafer sizes and substrates. It integrates the latest sensing and motion control technology to ensure precise placement and processing at a highly competitive cost. It has a maximum loading capacity of 8 kg and is capable of reaching speeds of up to 30 cycles per minute. As a truly reliable and cost-effective solution, SHIBUYA EH 182 is the perfect choice for semiconductor developers and wafer production.