Used SHIBUYA EH 520 #9253524 for sale

SHIBUYA EH 520 is a fully automated wafer handler used in semiconductor and flat panel device production lines. It is designed to quickly, efficiently and accurately handle wafers of various diameters, thicknesses and die configurations through thermal processing, dicing and cleaning. The device features an ergonomically-designed robot arm for precise handling of wafers, and a laser detection system for precise positioning. EH 520 uses a proprietary computer vision navigation system to locate and transfer wafers over the entire substrate processing area. The device uses a high-precision X-Y linear motor stage to securely hold and accurately scan wafer's surface with a laser diode. The scanning resolution is critical to allow the wafer to be moved precisely in the X and Y direction. SHIBUYA EH 520 is also equipped with a clamping mechanism to tightly hold the wafer with no substrate deformation after the laser positioning. EH 520 has an integrated programmable handling portion. This portion is used for parallel transport of a large number of wafers at once, allowing for higher throughput. The device also runs an integrated "palletization" algorithm that reduces the time it takes to move wafers from one process area to another. SHIBUYA EH 520 has a low profile design and offers a range of flexibility for a variety of application areas. The device has a modular design for easy maintenance and scalability. It offers a wide range of options for transport, sorting and cleaning wafers, and can handle a variety of thermal and mechanical processing stages, such as oxidation, plating, etching, and so on. EH 520 provides excellent precision and an impressive process rate of up to 600 wafers per hour. It operates with a very low noise level and is designed to meet the highest reliability standards, having undergone rigorous quality and performance tests. The device allows for an easy integration to other devices in the production line and is designed to last for many years, minimizing maintenance costs and allows the production line to operate at maximum efficiency.