Used SHINKO LM-ARM-CONT2 #293622429 for sale

Manufacturer
SHINKO
Model
LM-ARM-CONT2
ID: 293622429
Robot.
SHINKO LM-ARM-CONT2 is a wafer handler designed for semiconductor production and research applications. The device automates loading, unloading, and positioning of semiconductor wafers in optimal environmental conditions. It operates in an ultra-high vacuum environment to handle 150mm and 200mm wafers with a diameter of up to 4 inches. At the heart of LM-ARM-CONT2 is a dual-arm robot designed to provide smooth and precise control of the wafer during loading and unloading operations. It is powered by two independent motors and comes equipped with a highly sensitive optical sensor which performs predetermined movements based on the parameters of the installed wafers. The robot can be configured to handle different types of wafers, including cassette wafers and glass substrates. An additional feature is the ability to rotate the wafer in two positions upon loading or unloading, which minimizes potential damage to the wafer. The environmental chamber of SHINKO LM-ARM-CONT2 ensures a wide range of processing temperature and pressure settings, from -50°C to 500°C and from 0.01 Torr to 1 atmospheric pressure. In addition, the device comes with an advanced control system which provides a secure, safe and reliable operation. The control system features customizable automated processes, such as wafer pre-processing, and post-processing, as well as high-precision grids for precise alignment of wafers. In order to reduce maintenance time, LM-ARM-CONT2 comes with two maintenance-free, non-contact seals which ensure a long lifetime of the robot. The robot also features automated cutting functions, which enables precise cutting of fragile wafers. Finally, the optional mini-vacuum control system allows the user to adjust the vacuum levels during wafer handling. SHINKO LM-ARM-CONT2 is a versatile and reliable wafer handler designed to provide high throughput, superior accuracy and maximum flexibility in automated semiconductor processing. This efficient and reliable device can be integrated easily into multi-vendor installations and is ideal for advanced production and research environment.
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