Used STAUBLI CS7fsi RX90CR #293624190 for sale
URL successfully copied!
Tap to zoom
ID: 293624190
Vintage: 2000
Robot for FSI / TEL / TOKYO ELECTRON Mercury / Zeta
2000 vintage.
The Stäubli STAUBLI CS7fsi RX90CR is a high-performance, state-of-the-art wafer handler designed to provide a reliable and efficient transfer of substrates in the semiconductor industry. CS7fsi RX90CR is capable of processing up to 6" (150mm) wafers, with a load capacity of up to 165 wafers and an unload capacity of up to 350 wafers. The equipment is equipped with an ultra-precise air bearing gate and picker technologies. Both are designed with low-contact-shoulder structures, ensuring accurate movements with extremely 0.02mm Z-axis tilt control and stability. The system is further designed with a dual swing arm robotic motion that provides a soft and smooth motion, making it capable of picking, rotating, loading and unloading wafers easily. In addition, STAUBLI CS7fsi RX90CR is equipped with an advanced camera unit in order to scan and verify the wafer ID. The camera machine is capable of capturing up to 1000 images per second and contains definitive accuracy, making sure that wafers can be tracked efficiently and identified correctly. Moreover, CS7fsi RX90CR is designed with a user-friendly interface workstation. It consists of a color graphic HMI that provides clear, concise instructions and on-screen help to input parameters and instructions, minimizing the learning curve and allowing easier operation. The tool also comes with various communications busses, such as IEEE 1394, a serial RS232/485, and 14 port connections, providing a great level of flexibility. STAUBLI CS7fsi RX90CR also features enhanced safety systems, such as a light curtain to detect the presence of a human operator, power safety relays, and a safety box for added protection. The safety box is designed to prevent unauthorized access to parameters and prevent the inadvertent tampering with the asset. Overall, the Stäubli CS7fsi RX90CR is a high-performance wafer handler with outstanding features and capabilities, making it the ideal choice for demanding semiconductor industry applications.
There are no reviews yet