Used STAUBLI RX130 #293767434 for sale

Manufacturer
STAUBLI
Model
RX130
ID: 293767434
Vintage: 1994
Robot Robot arm CS7 Controller No driver Operating hours: 17000 1994 vintage.
The Stäubli STAUBLI RX130 is a semiconductor wafer handler designed for the transfer and handling of wafers up to 300mm in diameter. RX130 allows for quick and accurate wafer handling for a variety of applications, including opto-electronic, MEMS, CMOS, and other high-precision processes requiring a cleanroom environment. STAUBLI RX130 features a modular design for flexibility and adjustability. The wafer handler is made up of an endpoint gripper, a pivoting arm, two tilt actuators, and a central control unit for synchronizing all of the movements. The endpoint gripper is designed to grasp and secure the wafer in place, while the pivoting arm is designed to rotate the wafer to the desired position. The tilt actuators provide precise control over each wafer's exact orientation, and adjust the tilt angle of the wafer relative to its original tilt position. RX130 wafer handler is designed to operate with low levels of vibration and noise, making it ideal for wafer processing in sensitive cleanroom environments. The wafer handler also includes self-lubricating components that reduce the need for regular maintenance and can extend the lifetime of the handler. Additionally, STAUBLI RX130 is equipped with an array of safety features, ensuring that the wafer handler operates within the enclosed safe area and is monitored for proper functioning and position at all times. Furthermore, the integrated state-of-the-art controller enables the user to program the wafer handler for any number of wafer processing tasks. This controller allows the user to control the speed, coordinate points, and end points of the wafer transfer. Additionally, the controller is equipped with alarms, monitoring systems, and sensors to detect any abnormal activity and to alert the user. Overall, the Stäubli RX130 is a versatile and reliable wafer handler designed for the transfer and processing of up to 300mm diameter wafers in a cleanroom environment. It features a modular design for flexibility, and is designed with low-vibration and noise levels, as well as self-lubricating components, to ensure a long lifetime. The included state-of-the-art controller enables the user to program the wafer transfer and provide safety monitoring and alarms to detect abnormal activity or functions.
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