Used STAUBLI RX60 #9205957 for sale
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The Stäubli STAUBLI RX60 is a Multi-Axis Wafer Handler used in automated semiconductor manufacturing processes. This wafer handler offers a highly reliable and robust design, utilizing a precise multi-axis motion system capable of safely and accurately handling up to 6 wafers of 150mm in diameter. RX60 is designed to be mounted directly onto an automated equipment platform in a production line environment and provides an optimized solution for wafer loading, unloading, screening, and associated processes. STAUBLI RX60 Wafer Handler utilizes stepper motors to provide superior motion capabilities, with servo motor options available to deliver higher levels of precision. All axes are driven through a single timing belt and can be individually controlled for motion synchronization. A range of gear ratios are available to provide different repeatability levels and optimized speed. This wafer handler is equipped with selective electrical and mechanical wafer handling systems, and a choice of two wafer clamping systems. The motorized arm incorporates a motorized wafer clamping mechanism that ensures secure attachment of wafers and prevents motion drift. Additionally, a pneumatic wafer clamping mechanism is available with a soft touch feature that moves the wafers gently against the arm and provides additional stability. All components are designed to be maintenance free and are housed in a compact body, making it ideal for space constrained equipment. RX60 Wafer Handler features a modular wulf module for easy integration with various equipment platforms, and an advanced remote interface that can be used to monitor and control a variety of parametres. The wulf module also supports simultaneous input and output, allowing multiple machines to be connected for added convenience. The Stäubli STAUBLI RX60 is an advanced wafer handler specifically designed for accuracy and reliability in automated semiconductor production processes. It features a compact, modular design with a range of efficient motion capabilities, selectable electrical and mechanical handling systems, and pneumatic or motorized wafer clamping capability to ensure secure transfer of wafers without motion drift. The advanced remote interface allows for convenient monitoring and control of all parametres and provides an optimal solution for wafer loading, unloading, screening, and associated semiconductor processes.
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