Used STAUBLI RX90 LCRfsi #9255544 for sale

The STAUBLE STAUBLI RX90 LCRfsi is a wafer handler used in automated transport, inspection, and metrology systems. It is designed to transfer wafers and other substrates what ever the shape or material, quickly and accurately with minimal distortion. Its unique LCR (Linear Cartesian Robotics) design ensures smooth, fast movement and unparalleled accuracy. It uses a proprietary Smooth Spindle Drive (SSD) to create linear motion along three axes: X, Y, and Z. This allows the robot to move up to speeds of 5,000 mm/sec, with a resolution that exceeds 1 micron in all axes. The RX90 is also equipped with a Force Reactive Suspension (FRS) system that automatically maintains a consistently controlled gripping force regardless of the substrate size or shape, and ensures a secure grip on the substrate during transport. This reduces the risk of scratching, dislodging, or otherwise damaging the substrate while in the robot's grip. It also features an integrated vision system, which is capable of inspecting and measuring substrates with a resolution as high as 1.5 μm. The highly precise LCR design of the RX90 also allows it to maintain a total of 16-degrees of freedom in both forward and reverse motions. This helps to minimize the wobble typically found in other robotic systems, and ensures that the wafer is always positioned accurately at any given point in time. Additionally, its design ensures uniform substrate support along the entire transfer path and reduces the risks of vibration and collisions. Overall, the STAUBLE RX90 LCRfsi is an innovative and versatile wafer handler that was designed for the high-end processes found in the semiconductor industry. its advanced LCR design, intuitive force reactive suspension, and integrated vision system make it an ideal choice for any fabrication lab. It is capable of transferring and inspecting substrates with maximum efficiency and accuracy, at speeds up to 5,000 mm/sec, with a resolution of up to 1 μm.