Used SWECO ITAL-500 #9392922 for sale

SWECO ITAL-500
Manufacturer
SWECO
Model
ITAL-500
ID: 9392922
Auto loader.
SWECO ITAL-500 wafer handler is a robotic device designed to precisely control the in-line flow of wafers within a semiconductor processing environment. It is designed for use in applications requiring multiple wafer handling sequences, including epiwafer fabrication, wafer probers, and other related systems. ITAL-500 is comprised of an electromechanical wafer loader, a wafer transport mechanism, a spindle drive, and an optional slit-arm unit. The electromechanical wafer loader is designed for the loading of up to 100 wafers. A Vernier-scale is built into the loader for precise tolerance measurement and a plate positioned closer to the robot nozzle enables the pick-up of the wafers from the loader without contact damage. This ensures repeatable and accurate loading of the wafers. The wafer transport mechanism provides precise and repeatable motion along an inside track, allowing for multiple pick-up and delivery operations for wafers. The mechanism is designed to support +/- 1mm motion in the x- and y-axes, and +/- 0.5mm of motion in the z-axis. The incorporated spindle drive provides adjustable speed and direction control to enable precise handling of wafers during transport. Speed control is adjustable from 0 to 6,000 revolutions per minute, while the direction can be set independently in both clockwise and counter-clockwise modes. The optional slit-arm unit is designed for exact alignment of wafers within the system. A wafer guide eddy is provided to prevent wafer chipping, while a fine two-axis movements are adjustable to assist in maintaining alignment of the wafer. SWECO ITAL-500 is equipped with a variety of safety features. The included two-hand safety switching enables handling procedure to be started without the fear of erroneous motion. The motion-limits between each pick-up and delivery off-load point are monitored by a home-switch in order to protect the mechanism from any external interference. In addition, a 300-micron proximity sensor is provided to detect any obstructions of the wafer-loader during loading and unloading. In order to maximize the operational efficiency of ITAL-500, a touch Screen controller and teaching pendant are provided. The controller is designed for data entry of the various parameters required for wafer handling, while the teaching pendant allows for the programming of multiple wafer handling sequences. Further, the robot can be easily integrated into existing equipment via Ethernet, making it an ideal solution for semiconductor fabrication projects. Overall, SWECO ITAL-500 wafer handler is an ideal solution for semiconductor-processing applications requiring multiple wafer handling sequences. Its range of features and safety measures allow for precise and repeatable handling of wafers, while its intuitive controller and teaching pendant allow for easy programming and operation.
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