Used TAKATORI TRO-25C #9358488 for sale

Manufacturer
TAKATORI
Model
TRO-25C
ID: 9358488
Wafer Size: 6"
Vintage: 1998
Wafer transfer unit, 6" 1998 vintage.
TAKATORI TRO-25C is a high-performance wafer handler designed for mass production in semiconductor and electronics manufacturing. It offers high-speed and accurate operation, enabling efficient fabrication of devices. TRO-25C consists of two arms; an outer arm for handling the wafer and an inner arm equipped with a suction force and a holder function. The outer arm has high-speed linear motion and can accurately position the wafer onto the inner arm. The inner arm has a vacuum equipment to hold the wafer with low residual force, together with a holder and a cover to ensure uniform edge pressure and prevent wafer breakage. The wafer surface is protected by a cushion of air filled up to the high vacuum on the inner arm. Using a computer numerical control (CNC) system, TAKATORI TRO-25C can achieve an exceedingly high degree of accuracy. This is due to the high motor rotation speed and precision of the actuators, as well as the capability of switching between driving modes for each arm, including a high-precision positioning mode, a centering mode, a fast-speed mode and a conventional speed mode. TRO-25C is designed for both single-wafer and multi-wafer processes, with the capability to handle wafer sizes of up to 8". This is achieved with the fine angular and translational motion the arms are able to achieve. The outer arm is equipped with a special mechanism that captures and moves the wafers gently while keeping even air pressure around the wafer. TAKATORI TRO-25C is compatible with most wafer sizes, ranging from 100mm-200mm wafer diameter. This permits flexibility and high level of productivity. Furthermore, TRO-25C is equipped with an auto-calibration and a contamination management unit, as well as a visual inspection machine to monitor and detect abnormalities in the wafer handling process. Overall, TAKATORI TRO-25C is a professional-grade wafer handler built from high-quality components that offers superior accuracy, high-speed operation, and efficient wafer handling. With its sophisticated features, this wafer handler is well suited for mass production tasks in electronics engineering and semiconductor manufacturing.
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