Used VARIAN E19013780 #148779 for sale
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VARIAN E19013780 wafer handler is an automated robotic system designed for transferring wafers within a semiconductor wafer fabrication environment. The wafer handler consists of a mainframe consisting of an X/Y/Z motion assembly, a wafer transfer arm and a main CPU. Its mainframe provides the physical movement of various components of the wafer throughout the process. The X/Y/Z motion assembly consists of an X, Y, and Z axis drive motor which is used to move a load carriage, typically onto a vacuum and gravity slide tracks. The Z-axis drive motor is capable of adjusting the vacuum and gravity positions of a wafer onto the robot arm. The wafer transfer arm is a ram-type actuator which carries and rotates the wafer during the transfer process. The main CPU is responsible for controlling the movements and other actions, based on the instructions given. The wafer handler is capable of transferring wafers in a variety of configurations within the same workcell. The configuration of the wafer transfer arm is capable of providing up to four different positions for wafer transfer and rotation. These various positions are programmed to enable the robotic manipulator to accurately complete all of the sequential tasks in the workcell. The wafer handlers utilizes a number of sensors including proximity sensors, light towers, push buttons, and limit switches for providing feedback for controlling wafer movements. The robotic arm has the ability to manipulate wafers in both vertical and horizontal planes. The cycle time for the wafer handler is dependent on the time taken for the manipulation and transferring the wafers between the multiple components of the workcell. E19013780 wafer handler is designed to efficiently transfer, rotate and sort wafers in a semiconductor manufacturing environment. It is designed to provide high-speed and precise transfer of wafers with minimal cycle time and improved production yields. The wafer handler reduces human error and ensures accurate alignment of wafers during the entire process. The robot arm is capable of providing optimal performance based on its design and configuration.
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