Used YASKAWA 5010 #293652550 for sale

YASKAWA 5010 is a wafer handler designed by YASKAWA Electric to be used in the semiconductor industry. It is a robotic arm-based wafer handler suitable for a wide range of process tasks. It is capable of transferring wafers in sizes from 200mm to 600mm, with a transfer of up to 250 wafers per hour for 200mm and 150 wafers per hour for 300mm. It is equipped with 3 linear axes, allowing for precise and accurate motion of its components to ensure precise handling of the wafers. 5010 is made of an aluminum frame and a three-linear axis, which is driven by highly precise servo motors. It features a vision system to recognize and track the wafer position and orientation. The vision system can correct various processes and ensure precise placement of the wafers. Its precise wafer handling capabilities are due to its extremely fast response with excellent repeatability. YASKAWA 5010 can also move very quickly in both its linear and rotary axes. Its controller is PLC-based and is user-friendly and easily configurable. 5010 also has an efficient and controlled vacuum chucking mechanism. This feature provides secure holding of the wafer while ensuring that the wafer surfaces are not damaged. Moreover, the vacuum chucking mechanism helps provide the precise and accurate transfer of the wafers. It can also be used to control temperature and provide an optimal working environment during wafer processing. YASKAWA 5010's advanced safety features are also noteworthy. It has a soft-touch EEPROM memory for data storage, allowing for the safe handling of critical process data. With its user-friendly GUI interface, it is easy to set up and control the operation of 5010. It also has self-diagnostics capabilities to easily isolate and rectify any errors. In summary, YASKAWA 5010 is a reliable and efficient wafer handler suitable for a variety of process tasks and can be used to handle wafers in sizes from 200mm to 600mm. It has advanced safety features, a vision system, and a precise chucking mechanism that ensure the accurate and reliable handling of the wafers. Additionally, its controller is user-friendly and configurable, making it easy to operate.