Used YASKAWA CACR-PR01 #193015 for sale

YASKAWA CACR-PR01 is a high speed wafer handler designed for semiconductor fabrication processes. It is designed with an advanced servo-control equipment for high-precision wafer positioning accuracy and fast, gesture-based operation. CACR-PR01 integrates two high-precision DC servo motors, a time-saving Ymaster controller, and a user-friendly touch panel screen to provide a reliable wafer handling system. YASKAWA CACR-PR01 is capable of handling up to 200 wafers of 3-4" diameter with a maximum weight of 100 grams. It features an integrated lift/load and unload station allowing for safe and easy transfer to a single cassette. CACR-PR01 includes a full range of motion including tilt, pan, and rotate, for accurate wafer positioning and orientation. The motion range features the non-contact linear axis with high-precision resolution of 0.0025mm and 0.008 degrees respectively. YASKAWA CACR-PR01 is equipped with a high resolution, LED-backlit color LCD touch screen for easy user operation. The graphical user interface provides quick access to programs and menus, enabling quick set-up and unit changes. Advanced diagnostics provide feedback for improved wafer handling processes. CACR-PR01 also features PLC/NC compatibility, plus the ability to stream data to the PLC over Ethernet. YASKAWA CACR-PR01 includes a number of safety features for improved peace of mind. It can detect wafer overflow or release of wafers from the lift/load station, as well as sudden impact or load discrepancies, and instantly stops the operation. In addition, CACR-PR01 also features safety torque limiters on the DC servo motors, preventing possible damage due to an over-torque situation. YASKAWA CACR-PR01 is specifically designed to handle time-sensitive wafer fabrication processes, and can quickly move wafers between process cycles. The advanced motion control machine provides steady and reliable wafer movement. Additionally, the easy-to-use graphical interface allows for simple motion control and high-precision wafer orientation. This offers improved accuracy and repeatability when compared to conventional wafer-handling systems. Furthermore, CACR-PR01 includes a range of safety features, ensuring peace of mind when handling wafers.