Used YASKAWA SGD-01AN #193016 for sale
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YASKAWA SGD-01AN wafer handler is a robot arm used for the handling and position control of semiconductor wafers in a cleanroom environment. It is designed to provide precise and repeatable movement of wafers, with a repeatability of +/- 0.02 mm and position accuracy of +/- 0.1 mm. SGD-01AN is capable of handling wafers up to 200 mm in diameter and up to 7.7 kg in weight. The robot arm features a 6 degree of freedom structure, with an additional optional wrist module for extended motion range and versatility. It has a vertical range of 880 mm, tip angle of 360°, rotational range of ±340° for the shoulder axis, and rotational range of ≤235° for the elbow axes. The robot arm also includes an ethernet port for communications via Robotic Command Language (RCL) and Network Command Language (NCL). YASKAWA SGD-01AN is equipped with a highly configurable control module which provides a variety of motion profiles which suit the needs of various wafer application. Various motion control functions can be configured, allowing for wave-forms, interpolation commands, synchronous commands, absolute/incremental referencing, home referencing, teaching attribute creation, sensor input, and safety functions . Its clean room operations are supported via the use of a Class 10 clean air filter system, which includes filters for outlet air, aspirator air, and air tanks. This ensures that the wafers are handled with as much cleanliness and preventive maintenance as possible. SGD-01AN wafer handler is designed for reliability and performance over long usage periods. The robot arm is capable of continuous operation for up to 24 hours with no maintenance. It also features an industry-standard PLC controller, as well as a Voltage Keeper Controller, both of which deliver reliable control input and feedback regulation. In addition, YASKAWA SGD-01AN supports motion safety functions, which is essential for cleanroom environments. It also allows for continuous motion detection, obstacle avoidance, and a wrist guard cover, leading to operator safety and error avoidance throughout the handling process. Overall, SGD-01AN provides an efficient and robust wafer handling solution with reliable performance and motion safety functions. With its precise movements, extended range, and configurable motion profiles, YASKAWA SGD-01AN is an ideal choice for wafer applications.
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