Used YASKAWA XU-RC350D-J03 #293615372 for sale

YASKAWA XU-RC350D-J03 is a wafer handler designed to reliably transport, tilt and spin-wet wafers for semiconductor processing and wafer probing. This machine is specifically made for 300mm and 200mm wafer sizes. It has a vertical or horizontal configuration and features a fixed bowl with 360° rotation capability. XU-RC350D-J03 is based on a table motion equipment and a bowl motion system. It is capable of handling one wafer at a time, while also enabling repeatable tilt and spin-wet operation. The table motion unit features a vertical movement of up to 900mm, 0.01mm positioning accuracy and 10mm/sec high speed motion. The bowl motion machine has full 360° rotation capability with a repeatability of 0.25° and maximum acceleration of 250°/s2. YASKAWA XU-RC350D-J03 is equipped with an automatic centering device to adjust the zone size of the wafer position according to the process. The machine can also be configured with a wafer cassette for storage and automatic loading for wafers. XU-RC350D-J03 is designed to be both durable and energy efficient. It has a wide temperature range for wafer processing, from -5°C to 90°C and can operate within an atmospheric pressure range from 0.7MPa to 1.1MPa. It has a built-in diagnostics tool for preventative maintenance and external network communication capabilities via ethernet, power over ethernet and/or USB. YASKAWA XU-RC350D-J03 has a compact and lightweight design, making it easy to install within production lines. It is also designed to be highly ergonomic and user-friendly, with intuitive programming and operation to reduce the learning curve. XU-RC350D-J03 is an all-in-one wafer handler, offering reliable operation and flexibility for a variety of processes.