Used YASKAWA XU-RCM6501 #293656479 for sale

YASKAWA XU-RCM6501 is a robot-based wafer handler suited for semiconductor wafer processing. It is designed to be able to hold and transport a 2-inch single wafer in a controlled environment. XU-RCM6501 offers a range of features for use in automated production lines. YASKAWA XU-RCM6501 is available in both a single-arm and twin-arm configuration. The single-arm configuration is capable of handling 8-inch wafers with a maximum capacity of 75kg. The double-arm configuration can handle 8-inch wafers with a maximum capacity of 118.8 kg. It is able to achieve speeds up to 200 cycles per minute. The wafer handler is equipped with a high-precision three-axis robot arm driven by servo motors and absolute encoders. This enables accurate and repeatable positioning of the wafer. It also incorporates a vision camera and laser-distance measurement system which is used for improved accuracy and repeatability. XU-RCM6501 features a flipper arm which provides 360-degree rotation and is capable of handling wafers up to 300mm in diameter. The flipper arm allows for the wafers to travel between the multiple stations in the production line. YASKAWA XU-RCM6501 also includes an integrated safety system which is designed to provide enhanced safety for wafer handling. The safety system includes covers for the applicable areas of the robot as well as sensors which help prevent unforeseen errors. In addition, XU-RCM6501 features a number of options for customizing the installation, such as automatic loading and unloading of carriers, automatic cleaning of the robot arm, and a variety of programmable speed settings. Overall, YASKAWA XU-RCM6501 is an efficient and reliable robot-based wafer handler capable of accurately and safely handling wafers of various sizes. The advanced features of XU-RCM6501 make it an ideal choice for production lines requiring consistent and high-speed handling of wafers.