Used YASKAWA XU-RVM4100 / XU-RVM4110 #293642781 for sale

YASKAWA XU-RVM4100 / XU-RVM4110 Wafer Handler is robotic equipment designed for high precision handling of wafer disks in semiconductor and photonics devices. This wafer handler consists of a robotic arm that can move around a wafer up to 600mm in diameter, loaded with one or two cassettes or frames. The robotic arm has a powerful motor which is capable of up to 0.4Hz speed for horizontal and vertical movements. XU-RVM4100 / XU-RVM4110 is equipped with a high resolution vision system which ensures accurate wafer positioning and grasping without unnecessary laser interference and vibrations. The wafer handler is based on the XU-RVM4000 series robotic platform, which is characterized by its very compact form factor and a simple user interface. Its advanced software enables robust loading and unloading of wafers and other objects with reliable accuracy. Furthermore, YASKAWA XU-RVM4100 / XU-RVM4110 supports multiple point-of-use locations and flexible modular design to meet customer requirements. The wafer handling capacity is up to 50 wafers per cycle, and a maximum wafer capacity of 350 wafer pieces. The wafer handler is designed with multiple safety features such as dual collision detection sensors and multiple levels of ESD protection. It also uses a pressure sensor inside the robot arm to detect any contact between the robot and the wafer to prevent damage. XU-RVM4100 / XU-RVM4110 is compliant with SEMI-F47 standard and CE-mark. It also meets SEMI S2-0806, S2-0807, S2-0808, S2-0903, S2-1106, N1-0503, E14, and other safety standard requirements. YASKAWA XU-RVM4100 / XU-RVM4110 wafer handler is designed for maximum flexibility, offering speed, precision and dependability. It provides a reliable and cost-effective solution for handling large volume of wafers for semiconductor and photonics applications. This wafer handler provides user with improved efficiency, better yield and production increase.