Used ASML 2500/40 #9004040 for sale

Manufacturer
ASML
Model
2500/40
ID: 9004040
Stepper.
ASML 2500/40 is an advanced wafer stepper developed by ASML, a leading manufacturer of semiconductor equipment. It is designed to optimize the photolithography process for the manufacture of integrated circuits and microprocessors. The stepper features a rapid response, precise movement, high pattern accuracy, and reduced cycle time, allowing chipmakers to further advance the size, speed and complexity of their designs. ASML 2500 / 40 features a 245mm scan field, an effective resolution of 56nm, and a throughput of 1400 wafers per hour. It is compatible with all major mask sizes and materials and is capable of 0.18° arcsec repeatability and 0.8nm accuracy. The equipment employs ASC 200 Z-tilt technology, which allows horizontal, vertical, and rotational movements of the mask stage to improve process performance. The stepper's compact DUV illumination system uses DUV/157nm radiation, enabling high-resolution imaging while reducing power consumption and footprints. It includes advanced beam delivery components such as an optical unit, optics path, projection lens, slit, and beam deflector. The slit assembly provides infrared light protection and is designed for extreme temperature conditions. 2500/40 operates on a networked environment and is equipped with a web-based Graphical User Interface (GUI). This makes it easy to access and adjust settings for maximum process control and uptime. The machine also features tool management and data analysis functions for traceability and quality control. 2500 / 40 is a reliable and highly advanced wafer stepper, designed to support complex device structures at feature sizes down to 56nm. With dual stage correction technology, a highly accurate and efficient illumination tool, and advanced tool management features, ASML 2500/40 provides an unprecedented level of performance at the lowest cost per wafer.
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