Used ASML 5500 / 100 #9040162 for sale

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ASML 5500 / 100
Sold
Manufacturer
ASML
Model
5500 / 100
ID: 9040162
Wafer stepper, 6"
ASML 5500 / 100 is a wafer stepper equipment used in the production of computer chips. The system enables the precise transfer of information from a mask or reticle to the wafer during the photolithography process. This unit is capable of transferring information accurately and consistently with minimal user intervention, allowing for high quality and efficient production of semi-conductor components. ASML 5500/100 utilizes a six-axis design featuring a machine with 6 independent motorized components sacrificing only 2 axis of motion with tilt and roll. This allows for smooth movement of the substrate, to target imaging positions, faster than ever before. It is capable of handling substrates up to 300mm, with an image size up to 6.2mmx6.2mm. The tool also has a maximum field of view of 0.7um x 0.7um, with a resolution of 0.1um. The asset offers high-precision optical services, such as optical imaging, optical patterning, and mask alignment. Optical imaging enables the transfer of an image from one substrate to another, while optical patterning provides continuous, high-precision traceability of the patterning information. The high-precision mask alignment capability ensures that the pattern is accurately reproduced. In addition to the optical services, the model is also capable of providing exposure control services that ensure accurate and consistent exposure of the mask or reticle to the substrate. The equipment uses several types of wavefront sensors to detect aberrations and distortions in the wavefronts, allowing for corrections to be made in the exposure process. Overall, 5500 / 100 is an advanced wafer stepper system, capable of providing high-precision optical services and exposure control functions. It is capable of accurately transferring images from one substrate to another, allowing for the consistent production of semi-conductor components with minimal user intervention.
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