Used ASML AT 1150 #293664233 for sale

ASML AT 1150 is a top-of-the-line wafer stepper that helps manufacturers create miniature circuit components for the electronics industry. The stepper is capable of automatically and accurately lithographically exposing a pattern onto the surface of wafers used in this production process. The stepper operates with high precision, making it an essential part of commercial production lines for circuits and components used in products like data chips and microprocessors. The equipment is built around a highly advanced two-stage optical system, based on a twin 'Nipkow' disk and a DUV (deep ultraviolet) light source, which offers a maximum resolution of 4.5 nanometers and the potential of creating extremely small patterns on a wafer. As a result, the lithographic output of the stepper is of extremely high quality. The stepper also operates with a low-noise platform and utilizes a set of high-precision linear motor stages to move the wafer in the X-, Y- and Z-axes between exposure steps. This ensures precise and accurate alignment of various structural levels. Also included are a comprehensive set of digital control functions such as parameters for the Z-axis movement, exposure time and several alignment levels. Readers are available for measuring alignment marks arround a wafer's circumference, LWD (Line Width Doubling) checks, focus detection and aerial imaging to evaluate and characterize process results. An Indexer for full reticle translation capability is also available for unparalleled uniformity of scan exposure across the entire wafer shape and size. In addition, AT 1150 is equipped with extensive unit safety functions and provides a multi-level password protection machine. All of this makes ASML AT 1150 an optimal choice for high-volume production of memory wafers, logic wafers, DRAM wafers, non-volatile memory wafers and other high-end circuits.