Used ASML AT-1150C #9292620 for sale

ASML AT-1150C is a wafer stepper, or photolithography machine, used in semiconductor and other industries for producing integrated circuits and other devices. The stepper utilizes advanced optical technologies, including mercury-vapor lamps, lasers, and ultraviolet and near-infrared LED optics, to accurately project a set of patterns and blueprint onto the surface of a wafer or similar piece of material. The wafer stepper consists of two major components: the main body and the optics head. The main body includes a four-axis equipment, providing precise movement in the horizontal, vertical, and tilt directions as the wafer is transferred back and forth from the optics head. It includes a base plate, precision rotating wafer table, feed mechanism and optics head mover, all of which use a five-phase hybrid motor to ensure accurate positioning and transfer of the wafer. The optics head contains a short-arc lamp, optical lens system, iris diaphragm, and three optical mirrors. It is used to concentrate the beam of light from the lamp and project a set of etched patterns onto the wafer surface. ASML AT 1150C supports a variety of projection profiles, allowing it to be used for a wide variety of circuit types. It has an automated alignment unit, which utilizes a combination of numerical algorithms and optics positioning to quickly adjust the optics head to the correct focus position for each pattern or blueprint. Additionally, the stepper can be programmed for a variety of functions, such as layer exposure, wafer check reference points, wafer analysis, and process optimization. AT:1150C is capable of achieving a resolution of 0.5 µm and an accuracy of 0.3 µm in chip design layout when used with the dedicated wafer-mapping metrology machine. It is equipped with laser alignment technologies, such as multiple-field alignment and fiducial alignment, to reduce misalignment errors in chip design. The machine utilizes an automated process control monitor, which can measure wafer thickness, coatings, and pattern defects. With a cycle time of only 12 seconds, ASML AT-1150 C is capable of producing high-quality chip designs quickly and efficiently. The machine is also energy efficient, requiring only 0.7 kW of power at peak performance. Its sealed body and dust-free design make it ideal for applications that require cleanroom processing. Additionally, the stepper is equipped with safety systems, such as emergency stop switches and poisoned shutters that can be easily opened in case of an emergency.