Used ASML AT-850C #293591901 for sale

ASML AT-850C
Manufacturer
ASML
Model
AT-850C
ID: 293591901
System CYMER ELS-7600.
ASML AT-850C is an advanced lithography equipment specifically designed for large-scale photolithography processes. This stepper is used by semiconductor manufacturers to create highly accurate patterns on wafers, which are then used in the fabrication process of integrated circuits. ASML AT850C is capable of producing patterns with a resolution of 8 micron while maintaining 0.43 micron registration accuracy. It has a large field-of-view of 780 mm x 680 mm, allowing it to work on large-scale wafers with ease. Its dust and contaminant-free design allows it to meet high cleanliness standards and offer reliable performance. This stepper features as an automatic balancing system for the optical column to ensure base stability, as well as a zoom imaging unit for high accuracy positioning. It also has an internal calibration machine designed to eliminate the need for external calibration and to reduce calibration times. AT:850C has a light source of a Xenon Lamp and is equipped with numerous features for configuring and controlling the exposure program. This tool is well suited for high accuracy fabrications, thanks to its advanced software package designed to maximize stepper performance and efficiency. It utilizes image-based fault detection and error correction to ensure high quality patterns. This stepper is also equipped with a variety of safety features, such as interlock and safety interlock systems that prevent incorrect machine operation. It is built with an automatic movement function which lets the asset move to a pre-programmed position with just one button press. AT 850 C is a high-precision machine necessary for extremely accurate fabrication practices. As one of the most advanced steppers in the market, this model offers excellent performance and exceptional reliability.
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