Used ASML AT-850C #9235474 for sale

ASML AT-850C is a wafer stepper designed for the semiconductor industry. This device is typically used in applications such as high-precision lithography to create semiconductor chips. The design of ASML AT850C features an incoherent illumination equipment which uses lens configurations corresponding to the desired pattern. This system is composed of an automatic alignment unit, high-resolution imaging optics, precise multi-zone stage, and dedicated wafer holder. The automated alignment unit of AT:850C allows for real-time alignment validation for the patterning of the device. This is done by detecting various parameters such as the shift in position, rotation offset, distortion, and intensity. In addition, ASML AT 850 C is capable of parallel processing of up to 8 independent patterns all while maintaining high accuracy and throughput. The high-resolution imaging optics of AT-850C enable very precise imaging of the desired patterns. The lens configurations are maintained with high accuracy and can be quickly adjusted for changing conditions. This feature allows for maneuverability and a low photolithography margin, resulting in higher yield of production. The wafer stage of AT 850 C offers and x, y resolution of up to 0.1micron, and z resolution down to 25nm. This highly precise stage allows for a small, yet resolved imaging area in each zone. This also allows for overall miniaturization of the unit components. In addition, the wafer stage possesses a large, flat, and smooth table for accurate movements of the wafer. ASML AT:850C is also equipped with a wafer holder that provides quick and easy exchange for different wafer sizes. This wafer holder provides a secure tab machine to accurately advance wafers through the production process. Furthermore, this device is integrated with a tilt and an angle base for tilt correction. The tilt base operates with an accuracy of 1 arc second for increasing process efficiency. Overall, AT 850C is a versatile wafer stepper designed with precise optics and staging capability. This device provides a high precision environment for the production of cost-effective semiconductor chips. ASML AT 850C is equipped with modern design tools and capabilities that make it suitable for various lithography applications.