Used ASML AT-850C #9256715 for sale

ASML AT-850C is an advanced stepper-based lithography equipment by ASML. It features a Scanning Exposure System (SES) that enables the fast and accurate scanning of large fields at high resolution. ASML AT850C is used for the production of small-scale circuitry such as VLSI, semiconductors, and integrated circuits for consumer electronics products. At the heart of the unit is ASML proprietary LTS 800 Scanning Exposure Machine, engineered to provide precision and flexibility. The tool provides improved imaging performance, enhanced speed, improved image field size, and improved image quality. The SES features a scan field of 12 inches with a maximum resolution of 65nm and a dynamic range of 16 bits. The Exposure Control Asset (ECS) has been designed to meet the highest standards of operation for incorporating multiple lithography layers within the same exposure. AT:850C offers an advanced adaptive alignment model in order to strengthen the accuracy of the exposure. The equipment is capable of maintaining subpixel accuracy of 0.5μm and can compensate for distortions caused by vibration, inclination, and uneven film thickness. Furthermore, the Auto Exposure Analyzer (AEA) resides within the system to provide detailed alignment information such as field sizes, exposure levels, shot size, and edge positions. This is in addition to the signature waveform monitoring, to ensure long term process stability. AT850C is also equipped with several environmental sensors designed to protect the unit from dust particles that may interfere with the imaging process. These sensors include a temperature sensor, high current monitor, and humidity monitor. This ensures the machine is properly sealed from dirt and contaminants and allows the machine to operate in a clean environment. The machine also includes an advanced cooling tool to ensure reliability and longevity. This is achieved by circulating cooled liquid and air within the asset enhancing the performance of the exposure model, and eliminating the heat dissipated during operation. In conclusion, AT 850C is a highly advanced wafer stepper designed to produce high-end integrated circuits. It features a Scanning Exposure Equipment (SES) and an Exposure Control System (ECS) for precise imaging processes. It also comes with an adaptive alignment unit and a signature waveform monitor in order to maintain high accuracy and long-term process stability. Lastly, the machine contains a dust-protection tool and cooling asset for optimal and reliable operation.