Used ASML AT-850C #9293663 for sale

ASML AT-850C
Manufacturer
ASML
Model
AT-850C
ID: 9293663
Wafer Size: 12"
Vintage: 2003
System, 12" 2003 vintage.
ASML AT-850C is a state-of-the-art wafer-stepper that is designed to support 193 nm stepper applications. It is designed to produce very precise, effective, and consistent lithography results. ASML AT850C is designed to be used in wide range of applications such as EUV business applications, mask making industry, and lithography applications. AT:850C wafer stepper is designed with a minimum numerical aperture of 0.76 and a maximum full numerical aperture of 0.80 to achieve lithography. Its illuminator equipment that is based on alternating polarized diffractive optical elementsis enables polarization dependent illumination with polarized illumination for consistent pattern fidelity. The stepper is also equipped with highly advanced and precise positioning mechanism that is designed to align the wafer with optical components with a precision of 1 micron to achieve accurate stepper alignment and focus performance. ASML AT 850C is powered by a hybrid magnetic and linear direct drive scanning system that is designed to eliminate hysteresis in the scanning unit. It also supports fast scanning speed and with a constant acceleration and deceleration to ensure constantly sharp imaging results on the sample. It is powered by a high performance resonance subsystem that is designed to reduce unwanted vibrations and deliver steady imaging results. The wafer stepper supports a wide range of features including a high-precision dual-track mask aligner, an enhanced four-quadrant field overlap option to provide better imaging results, an enhanced multi-track auto-focus calibration, improved optical machine de-wing, an automated stepper cleanliness check, and improved illumination stability. The stepper also includes a feathering alignment function that is designed to align multiple exposures to improve accuracy, and an algorithm-enabled self-leveling feature to avoid misalignment. Finally, AT850C is equipped with an eye-safe closed-loop laser that is designed to ensure safety by constantly monitoring the laser beam. In addition, the stepper also includes customized vision systems such as contrast detection, additional creative illumination patterns, and an enhanced illumination symmetry option. Overall, ASML AT:850C is a highly advanced and sophisticated wafer-stepper that is designed to deliver consistent, precise, and accurate lithography results for a wide range of applications.
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