Used ASML AT-850C #9404356 for sale
URL successfully copied!
ID: 9404356
System, 8"-12"
SMIF / FOUP
CYMER ELS 7600 Laser
AOM Laser
Excimer laser
LMA Module
Bottom module
MCM (Machine Cabinet Module)
Reticle, 6"
Left in-line
Wafer stage
Reticle stage
Wafer handler
Reticle handler
Charcoal filter
Side channel blower
Air Control Cabinet (ACC)
(2) Covering panels
Frame parts: MB, Mcab, RH WH
Process module:
Composition / Type
PM1 / Light source
PM2 / Alignment
PM3 / Stage
Cabinet:
MDC
LCWC
MCWC
Exhaust cabinet
Spare parts included
Does not include Hard Disk Drive (HDD)
Operating system: UNIX
2004 vintage.
ASML AT-850C is a stepper that is used to fabricate semiconductor devices. It can produce a variety of devices, such as integrated circuits and memory devices. ASML AT850C is an advanced stepper with a large aperture, high resolution and a high throughput. It is an I-line stepper and can also be used with KrF lithography. AT:850C combines a highly precise lens design and an advanced multi-axis alignment equipment that enables users to achieve high resolution and accurate critical dimension (CD) alignment for device fabrication. The machine also has a long depth of focus (DOF) which allows for the imaging of all layers of a device with minimal tilt errors. This makes ASML AT:850C suitable for producing high performance devices with a high yield rate. AT-850C is a high temperature vacuum stepper, which enables users to operate the machine in a stable environment, with good process control, giving users a consistent imaging performance. It is also equipped with a highly uniform light beam management system, which is necessary for lithography performance and exposure accuracy. ASML AT 850C features a comprehensive software suite that helps users in automated alignment and exposure, as well as data management. This allows users to quickly and accurately adjust to the changing wafer environment, optimizing both throughput and device yield. The machine also has a multi-mode exposure unit that maximizes throughput, ensuring that devices are exposed as quickly and accurately as possible. AT 850C is a powerful tool for device fabrication. Its large aperture, high resolution and high throughput make it ideal for producing high performance devices. Its multi-axis alignment machine and software suite provide users with detailed control over device exposure, ensuring high device yields and accurate device images.
There are no reviews yet