Used ASML AT400S #293625709 for sale

ASML AT400S
Manufacturer
ASML
Model
AT400S
ID: 293625709
i-Line stepper With scanner With TEL / TOKYO ELECTRON Clean Track ACT 12 Wavelength: 365 nm.
ASML AT400S is an advanced, state-of-the-art wafer stepper for photolithography, used to pattern integrated circuits. It is a specialized, highly accurate tool for creating submicron structures on a semiconductor wafer. It uses near-ultraviolet, visible or infrared light and a mask to transfer a pattern onto a surface. AT400S features a 700mm, 300mm field size and an advanced Theta positioning stage. This equipment has a resolution of 5-6nm linear and 12nm rotation accuracy. It has a numerical aperture of 0.55, making it capable of working on high-resolution ICs with very tight tolerances. ASML AT400S is designed with a wide range of automation features, including image recognition, motion control systems, and automated batch processing. It also has the ability to store and recall recipes, enabling the pattern designer to quickly set up and run the system. AT400S is extremely user-friendly, with a graphical user interface and intuitive control. It has a built-in tracking and alignment unit, which automatically maintains registration accuracy by tracking the pattern setup and alignment parameters for each exposure cycle. This allows for repeatable and predictable results. ASML AT400S is equipped with a wafer scanning machine, which allows for scanning whole wafers for defects. This tool has the capability to detect and reject defective sections, improving yields and saving time. The production capabilities of AT400S are unparalleled, with the asset able to operate at a speed of up to 60,000 units per hour. This allows manufacturers to increase their production efficiency, reduce costs, and improve product quality. Overall, ASML AT400S is a sophisticated, precision wafer stepper designed to create integrated circuits with highly accurate patterns and extremely tight tolerances. This model is designed with a host of automation features, intuitive controls, and production speeds which are unmatched in the industry.
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