Used ASML PAS 2500 / 40 #293629183 for sale

Manufacturer
ASML
Model
PAS 2500 / 40
ID: 293629183
Stepper.
ASML PAS 2500 / 40 is a wafer stepper designed for manufacturing semiconductors, display panels, and medical imaging components. It is equipped with state-of-the-art optical imaging, projection and positioning technology, to deliver optimal image uniformity and substrate motion control in semiconductor processing applications. At the core of the equipment is a dual-imager setup, which combines two 125 mm lasers to create a single 250 mm source. This feature is responsible for the high throughput and very-high-resolution imaging of substrates up to 8" in diameter. Additionally, the dual-laser system is capable of 350nm light source imaging with fluctuation less than 1nm. The unit is equipped with an advanced x,y, z motion control machine for precise movement of the substrate. It uses a precision linear motor designed to provide quick and accurate stage movement. The combination of high throughput, high resolution, and high accuracy position control allows the tool to achieve a throughput of up to 40 wafers per hour. Also built into the asset is an integrated wafer handling model. This automates the traditional substrate loading process to reduce complexity and increase cycle time. The loader and unloader use an articulated arm design to maintain the substrate position and optimize the process time. The combination of automation and precision motion control allows the equipment to achieve uniform imaging and processing times. To further increase the system's capabilities, ASML PAS 2500/40 is equipped with a variety of optional features. The software suite is able to accommodate for a wide range of substrates, as well as allow for custom processes and recipes. Additionally, the unit is compatible with a variety of process hardware, such as spin-rinse dryers, clean modules, and slit lamp systems. PAS 2500 / 40 is a highly efficient and customizable wafer stepper. It combines precision motion control, dual-laser imaging, automated wafer handling, and a robust software suite to deliver the best possible imaging and process control. With its high throughput, advanced imaging technology, and compatibility with a variety of process hardware, PAS 2500/40 is an ideal solution for any semiconductor processing needs.
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