Used ASML PAS 2500 / 40 #293765923 for sale

Manufacturer
ASML
Model
PAS 2500 / 40
ID: 293765923
Wafer Size: 3"
Wafer stepper, 3" Resolution, 0.7 µm Reticle handling PCB Stamp up / Down Focus laser drive Diode control P-Chuck pre amplifier Blades control Blades DR Motor relay Relay card Voltage current Interference filter Focus servo Reticle table table control Timing control card Hinds modulator Alignment counter Alignment Mux + Dem Velocity card Bar code reader Commutator Charge amplifier Wafer handling Cyber termination Floppy termination 2500x Table control PAS 2500T Table control Mains switch relay card Pin spot sensor Wafer quality and ambient Signal conditioning board RMS WH Pre amplifier HTW HV Cable with ferrite Ring Cables / Sensors CYBEC Transmitter, 4" CYBEC Receiver, 4" Hard Disk Drive (HDD) (3) P Chuck motors Motor realignment unit (X/Theta Reticle handling) Boards missing.
ASML PAS 2500 / 40 is an advanced wafer stepper used in semiconductor production. It is a fully automated, precision device capable of accurately and reliably processing wafers up to 40 centimeters in diameter, and performing a wide variety of processes during lithography. The system is built around an overall Y-N Table platform, with a 'galvanometer driven' scanning head on top. This delivers ultra-precise laser pulses to the wafer surface, allowing for incredibly accurate line segmentation during lithographic etching. The X-Y Table also allows for highly precise placement of the wafer in the stepper holder, and provides a flat plane for optimal processing. The wafer is loaded into ASML PAS 2500/40 via a robotic arm, and then placed within the stepper holder. Alignment processes occur to ensure precise positioning of the wafer in the stepper, and then various alignment processes such as reticle to substrate alignment and at-the-wafer alignment occur. The wafer is then exposed twice, receiving both an 18μm and an 8μm layer of resist. Finally, the features on the wafer surface must be aligned. This is accomplished via a process called 'OptiChromatic', which relies on diffractive optics and chromatic aberrations to correct for distortions in image size, placement and position. The wafer is then subjected to a specific etching process to form the necessary lines, shapes, and structures for the layer. The wafer surface is periodically monitored and inspected to ensure accuracy of the etching process, and corrections can be made if needed. Finally, when the etching process is complete, the wafer is unloaded from the stepper and transferred to the photoresist removal stage. Here, the photoresist which was earlier applied to the wafer is removed, leaving behind the accurately formed features. In conclusion, PAS 2500 / 40 is an advanced, highly precise stepper used in lithography and etching processes. It provides critical alignment processes, accuracy and reliability to the semiconductor production process. It also allows for ultra-precise laser pulses to be delivered to the wafer surface, which results in accurate line segmentation, and thus creating the necessary features and structures for the layer.
There are no reviews yet