Used ASML PAS 2500 / 40 #293765923 for sale
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ID: 293765923
Wafer Size: 3"
Wafer stepper, 3"
Resolution, 0.7 µm
Reticle handling PCB
Stamp up / Down
Focus laser drive
Diode control
P-Chuck pre amplifier
Blades control
Blades DR
Motor relay
Relay card
Voltage current
Interference filter
Focus servo
Reticle table table control
Timing control card
Hinds modulator
Alignment counter
Alignment Mux + Dem
Velocity card
Bar code reader
Commutator
Charge amplifier
Wafer handling
Cyber termination
Floppy termination
2500x Table control
PAS 2500T Table control
Mains switch relay card
Pin spot sensor
Wafer quality and ambient
Signal conditioning board RMS
WH Pre amplifier HTW
HV Cable with ferrite Ring
Cables / Sensors
CYBEC Transmitter, 4"
CYBEC Receiver, 4"
Hard Disk Drive (HDD)
(3) P Chuck motors
Motor realignment unit (X/Theta Reticle handling)
Boards missing.
ASML PAS 2500 / 40 is an advanced wafer stepper used in semiconductor production. It is a fully automated, precision device capable of accurately and reliably processing wafers up to 40 centimeters in diameter, and performing a wide variety of processes during lithography. The system is built around an overall Y-N Table platform, with a 'galvanometer driven' scanning head on top. This delivers ultra-precise laser pulses to the wafer surface, allowing for incredibly accurate line segmentation during lithographic etching. The X-Y Table also allows for highly precise placement of the wafer in the stepper holder, and provides a flat plane for optimal processing. The wafer is loaded into ASML PAS 2500/40 via a robotic arm, and then placed within the stepper holder. Alignment processes occur to ensure precise positioning of the wafer in the stepper, and then various alignment processes such as reticle to substrate alignment and at-the-wafer alignment occur. The wafer is then exposed twice, receiving both an 18μm and an 8μm layer of resist. Finally, the features on the wafer surface must be aligned. This is accomplished via a process called 'OptiChromatic', which relies on diffractive optics and chromatic aberrations to correct for distortions in image size, placement and position. The wafer is then subjected to a specific etching process to form the necessary lines, shapes, and structures for the layer. The wafer surface is periodically monitored and inspected to ensure accuracy of the etching process, and corrections can be made if needed. Finally, when the etching process is complete, the wafer is unloaded from the stepper and transferred to the photoresist removal stage. Here, the photoresist which was earlier applied to the wafer is removed, leaving behind the accurately formed features. In conclusion, PAS 2500 / 40 is an advanced, highly precise stepper used in lithography and etching processes. It provides critical alignment processes, accuracy and reliability to the semiconductor production process. It also allows for ultra-precise laser pulses to be delivered to the wafer surface, which results in accurate line segmentation, and thus creating the necessary features and structures for the layer.
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