Used ASML PAS 2500 / 40 #9010549 for sale

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Manufacturer
ASML
Model
PAS 2500 / 40
ID: 9010549
Steppers.
ASML PAS 2500 / 40 is a two-beam step and scan machine that provides high accuracy and high throughput for volume submicron photolithography applications. ASML PAS 2500/40 equipment includes two independent modules, the Scanner and the Source. The Scanner is the main control module and includes a full-field source mask scanner, an angle of incidence control module, a CoaXPress communication protocol, and a controller to synchronize the data paths and movements. Meanwhile, the Source module consists of a full-field 40W pulsed laser light source, a polarized light delivery system, a wavelength monitor, and a grid monitor to ensure that accurate exposures are achieved every time. With these two modules, PAS 2500 / 40 is well-suited for improving the efficiency and accuracy of wafer scanning. Moreover, PAS 2500/40 comes equipped with an intuitive graphical user interface (GUI), allowing users to easily control the unit from the touch panel display. Furthermore, ASML PAS 2500 / 40 makes use of high-resolution scanning machine called SDF (Sequential Deflection Field Mode), which can reduce placement errors for wide-angle exposures and reduce distortion for long lines features. Moreover, ASML PAS 2500/40 is a full-field stepper, so it can provide up to 4000 programmable beams, which enable the imaging of high resolution circuitry with ease. As far as performance goes, PAS 2500 / 40 provides advanced resolution, superior depth-of-focus, and precise stage motion control. Its high accuracy is achieved through a combination of precision linear and angular measurements, such as encoder tracking and optical metrology tools. Also, the tool is designed to have low aberrations and low noise, ensuring superior imaging and photo-resistance. Finally, PAS 2500/40 comes with a variety of user-friendly features, such as automatic wafer recognition, wafer identification codes, and on-the-fly programming of parameters. As a result, this wafer stepper is one of the best solutions for high-end photolithography needs. Additionally, the asset provides straightforward monitoring with LED indicators and consistency checking, guaranteeing superior, accurate processes for every application.
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