Used ASML PAS 2500 / 40 #9245751 for sale

Manufacturer
ASML
Model
PAS 2500 / 40
ID: 9245751
Stepper, 4"-6" 1989 vintage.
ASML PAS 2500 / 40 is a wafer stepper, used to transfer circuit patterns onto a wafer. This particular model is an advanced 4-megapixel stepper with superior equipment performance, based on a unique and proven advanced projection technology using extreme ultra-violet (EUV) imaging optics. It provides improved imaging capability and reduced process throughput times. It has a large chamber size which helps to ensure homogenous and stable exposure conditions, leading to optimal image performance. It also has a higher throughput, with a process chamber size that is capable of accommodating up to 10 wafers in each exposure. The stepper is easy to use and has automated alignment features. ASML PAS 2500/40 features a highly accurate wafer positioning and auto-focusing systems, allowing for accurate exposure of wafers during the process. Advanced onboard sensors and an interface enable it to detect any problems whether it is an air contamination or a damaged wafer, allowing for quick service and optimal image quality. The stepper also is equipped with intelligent reticle handling and advanced automated repairs, offering complete process control. PAS 2500 / 40 has also been designed with special mechanical features that ensure minimal laser damage, enabling consistent image and process quality. This stepper is built to ensure reliability and safety, with features such as a wafer rotation system and an automatic reticle transport robot. It is equipped with an advanced data collection unit, providing detailed process monitoring and operational summary report. Its intuitive user interface and easy-to-use process control software allows for quick service and error-free operation, reducing time between exposure steps. It also has a remote access and monitoring machine that can monitor the entirety of the tool, service and maintenance requirements, and online stepper status for secure communication between the site and ASML. Overall, PAS 2500/40 wafer stepper is a reliable and efficient tool for high-precision wafer imaging. Its advanced imaging capabilities, safety features, and advanced data collection asset, ensure high-quality and consistent performance.
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