Used ASML PAS 2500 / 40 #9356981 for sale
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ASML PAS 2500 / 40 is a state-of-the-art, computer-controlled wafer stepper equipment. ASML PAS 2500/40 is capable of producing high-resolution images over a wide range of wafer sizes, from 2-5 inches in diameter. The system features a modular design that allows for easy set-up and reconfiguration of the unit, thus enabling the user to obtain an optimal performance and maximum throughput. PAS 2500 / 40 includes a highly precise, thermally optimized linear-drive stage, which utilizes a unique, patented, laser-based Active Path Compensation (APC) machine. This advanced APC tool compensates for the differences in wafer topography by adjusting the laser light intensity to reflect the topographical differences. As a result, the user is able to obtain extremely accurate alignment of the optical components on the wafer. Additionally, PAS 2500/40 incorporates a fully closed loop control asset, allowing for complete real-time feedback of the position and exposure parameters. ASML PAS 2500 / 40 also offers several advanced imaging capabilities, such as image stabilization, field curvature correction, and a choice of several exposure modes. It also includes an efficient differential alignment model (DAS) that eliminates the need for manually focal plane adjustments. Furthermore, ASML PAS 2500/40 has optional high-accuracy overlay capability, which provides high-quality overlay matching of the optical patterns on the wafer. PAS 2500 / 40 utilizes an advanced optical design, which combines the main optics and fast- (attenuator) lenses in the same equipment. The result is an enhanced resolution and lower distortion. Furthermore, the system also offers an extensive library of settings for a variety of different layers. Additionally, an extensive safety feature set provides superior protection for the user and the device. In summary, PAS 2500/40 features an advanced design, highly precise components and excellent imaging capabilities. It offers flexibility, precision and image accuracy, making it an excellent choice for wafer stepper systems.
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