Used ASML PAS 2500 / 40 #9356981 for sale

ASML PAS 2500 / 40
Manufacturer
ASML
Model
PAS 2500 / 40
ID: 9356981
Wafer Size: 5"
Steppers, 5".
ASML PAS 2500 / 40 is a state-of-the-art, computer-controlled wafer stepper equipment. ASML PAS 2500/40 is capable of producing high-resolution images over a wide range of wafer sizes, from 2-5 inches in diameter. The system features a modular design that allows for easy set-up and reconfiguration of the unit, thus enabling the user to obtain an optimal performance and maximum throughput. PAS 2500 / 40 includes a highly precise, thermally optimized linear-drive stage, which utilizes a unique, patented, laser-based Active Path Compensation (APC) machine. This advanced APC tool compensates for the differences in wafer topography by adjusting the laser light intensity to reflect the topographical differences. As a result, the user is able to obtain extremely accurate alignment of the optical components on the wafer. Additionally, PAS 2500/40 incorporates a fully closed loop control asset, allowing for complete real-time feedback of the position and exposure parameters. ASML PAS 2500 / 40 also offers several advanced imaging capabilities, such as image stabilization, field curvature correction, and a choice of several exposure modes. It also includes an efficient differential alignment model (DAS) that eliminates the need for manually focal plane adjustments. Furthermore, ASML PAS 2500/40 has optional high-accuracy overlay capability, which provides high-quality overlay matching of the optical patterns on the wafer. PAS 2500 / 40 utilizes an advanced optical design, which combines the main optics and fast- (attenuator) lenses in the same equipment. The result is an enhanced resolution and lower distortion. Furthermore, the system also offers an extensive library of settings for a variety of different layers. Additionally, an extensive safety feature set provides superior protection for the user and the device. In summary, PAS 2500/40 features an advanced design, highly precise components and excellent imaging capabilities. It offers flexibility, precision and image accuracy, making it an excellent choice for wafer stepper systems.
There are no reviews yet