Used ASML PAS 5000 / 275D #293817887 for sale
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ID: 293817887
i-Line stepper
Numerical Aperture (NA): 0.48-0.60
Resolution: 280 nm
DCO: 80
Throughput (WPH): >120.
ASML PAS 5000 / 275D is a highly advanced wafer stepper used in the semiconductor industry for photolithography processes. This equipment is designed and manufactured by ASML, a leading provider of photolithography solutions for the semiconductor industry. PAS 5000 / 275D model is part of ASML renowned PAS series of steppers, known for their precision, reliability, and high throughput capabilities. ASML PAS 5000 / 275D wafer stepper is equipped with a 5x reduction lens system, making it suitable for the production of high-resolution and high-density integrated circuits on silicon wafers. With a resolution capability of up to 0.25 microns, this stepper is well-suited for manufacturing advanced semiconductor devices that require extremely fine features and tight dimensional control. One of the key features of PAS 5000 / 275D is its advanced alignment and overlay control capabilities. The unit uses a sophisticated alignment machine to ensure precise alignment between the patterns on the reticle and the wafer, enabling accurate transfer of the circuit patterns onto the wafer surface. Additionally, the stepper is equipped with an advanced overlay control tool that minimizes alignment errors and ensures consistent overlay accuracy across the wafer. ASML PAS 5000 / 275D stepper also features a high-speed stage asset that enables rapid wafer positioning and exposure. This high-speed stage model, combined with ASML proprietary motion control technology, allows the stepper to achieve high throughput rates while maintaining high levels of accuracy and repeatability. As a result, PAS 5000 / 275D is well-suited for volume production of semiconductor devices with tight manufacturing tolerances. In terms of illumination, ASML PAS 5000 / 275D stepper uses a state-of-the-art illumination equipment that provides uniform and collimated light to ensure uniform exposure of the wafer surface. The system offers flexibility in terms of illumination settings, allowing users to optimize exposure conditions for different types of photoresist materials and process requirements. PAS 5000 / 275D stepper is also equipped with advanced image processing algorithms and software tools for automatic defect detection and correction. These capabilities help ensure the quality and reliability of the semiconductor devices manufactured using the unit, reducing the risk of defects and improving overall yield rates. Overall, ASML PAS 5000 / 275D wafer stepper is a cutting-edge photolithography machine that offers unparalleled performance, precision, and reliability for the production of advanced semiconductor devices. With its advanced alignment and overlay control capabilities, high-speed stage tool, and sophisticated illumination and image processing technologies, PAS 5000 / 275D is a trusted solution for semiconductor manufacturers looking to push the boundaries of semiconductor technology and achieve superior device performance.
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