Used ASML PAS 5000 / 50 #293749240 for sale

ASML PAS 5000 / 50 equipment is an advanced lithography solution for semiconductor production. The system provides unmatched performance and productivity, making it a critical piece of equipment for any semiconductor manufacturer. ASML PAS 5000/50 uses a wafer stepper to move the wafer and accurately align it with the photomask, allowing a pattern to be transferred to the wafer. The wafer stepper utilizes laser positioning, a dual-axis design, linear motors and encoders, and a motion control CPU. The mask aligner features a wide working distance and can accommodate any size mask up to 6 inches (15 centimeters). The unit provides a high resolution of up to 4nm, enabling features as small as 45 nm to be imaged. The mask aligner also has a maximum wafer size of 150 mm x 150 mm and can handle wafers with a range of materials, including quartz, silicon, and sapphire. PAS 5000 / 50 offers an automated alignment process that uses a combination of physical and visco-optical sensing to ensure precise placement of the mask relative to the wafer. In addition, the alignment and scan rings ensure that the mask and wafer are always aligned prior to each scan. This allows the machine to achieve the desired accuracy and repeatability for high-yield production. In terms of productivity, PAS 5000/50 can run up to 4,000 wafers per hour with a throughput up to 200 wafers per hour. The tool features built-in protection against mechanical and thermal damage to the wafers, as well as a wide range of exposure times and curing cycles. The user-friendly interface on ASML PAS 5000 / 50 makes it easy to control and monitor the asset. The model's software allows for real-time statistics, including wafer throughput, alignment accuracy, and throughput time. Additionally, the software enables stored data to be shared across multiple systems and offers an efficient recipe-switching capability. In conclusion, ASML PAS 5000/50 is an excellent solution for semiconductor production due to its high performance and productivity. Its wide-range of features ensures that the equipment can handle complex tasks, while its user-friendly interface ensures that it can be operated quickly and easily.