Used ASML PAS 5000 / 50 #9046375 for sale
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ID: 9046375
Stepper / scanner, 0.50um i-line, 3"-6"
Fully automated wafer handling system
2" with holders capable.
ASML PAS 5000 / 50 is a state of the art wafer stepper designed to meet the needs of high volume production. This device is capable of patterning critical layers of micro circuits on semiconductor wafers, and is ideal for the manufacture of modern digital technology. ASML PAS 5000/50 is an optimized lithography solution which utilizes high resolution lenses, advanced imaging systems, and sophisticated software algorithms to accurately pattern wafers. The equipment is flexible enough to support both single exposure and multiple exposure operations in a variety of resolutions. This is complemented by a high throughput production capability and minimal machine downtime. In terms of its optical design, PAS 5000 / 50 utilizes an advanced dual field lens with a numerical aperture of NA = 0.22 and a mirror-based projection alignment system, which allows for high-resolution imaging. The unit also features a fully integrated focus and exposure control machine, as well as an advanced aerial imaging tool and a camera calibration suite. PAS 5000/50 also features a motion arm and wafer chuck which allows for the placement of the wafer in the desired orientation, as well as allowing for accurate targeting and exposure of various regions of the integrated circuit. An automatic clamping asset counters rotational speed variations, thus enabling reliable patterning of the wafers. ASML PAS 5000 / 50 has also been designed with a series of automated process monitoring and management systems. This includes an advanced wafer defect inspection model, as well as a comprehensive process analysis package which allows for the rapid detection and diagnosis of any potential issues. Finally, ASML PAS 5000/50 is capable of running automated production recipes, which are programmed to ensure the highest quality standards are achieved in the manufacturing process. This allows for the lowest possible defect rates and for a faster production turnaround time. To sum up, PAS 5000 / 50 is a highly advanced wafer stepper designed to meet the needs of modern production requirements. With its customized optical design, integrated exposure and focus control, automated recipes, process monitoring, and management systems, this device is ideal for high volume wafer manufacturing.
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