Used ASML PAS 5000 / 50 #9223541 for sale

ASML PAS 5000 / 50 is an advanced wafer Stepper machine developed by the Netherlands-based ASML Holding N.V. The machine utilizes an advanced two-beam optical equipment, a new vibration absorber, and a updated lens system to accurately and precisely focus on the desired locations on the wafer being processed. ASML PAS 5000/50 is designed for use in wafer processing for semiconductor, MEMS, and NAND flash devices. It is equipped with a 40/50 kV electron source and designed for reliable imaging at low energy. It offers high throughput and excellent precision through a combination of advanced optics, motion control, and feedback systems. The two-beam optical unit of PAS 5000 / 50 provides a wide range of exposure angles and focal heights, enabling the machine to image large die that may be out of focus with traditional steppers. This combination of an improved optical tool and a new vibration absorber allows the machine to accurately image a wide range of features in a high-precision way. The combination of a new lens asset and control systems also allows PAS 5000/50 to integrate a number of additional features such as auto-positioning and auto-maintenance. Auto-positioning allows for automatic motion control of the wafer stage by changing the focal height and exposure angle, so that the desired site on the wafer can be quickly and precisely aligned. Auto-maintenance offers flexible and reliable in-line imaging. ASML PAS 5000 / 50 can achieve image resolution down to 0.25 µm, while a maximum stage acceleration of 4.5 m/s² ensures high throughput. Optional features can be added on to the wafer stepper, such as an automated wafer cleaning tool, an automatic wafer chipping tool, and a BOZR super-resolution option to improve contrast and reduce noise. Overall, ASML PAS 5000/50 offers an advanced and reliable wafer imaging solution for the manufacturing of semiconductor devices. It is an excellent choice for both researchers and manufacturers looking for an advanced and high-performance wafer stepper model.