Used ASML PAS 5000 / 55 #293586475 for sale

ASML PAS 5000 / 55
Manufacturer
ASML
Model
PAS 5000 / 55
ID: 293586475
Wafer Size: 6"
Steppers, 6" 0.5um.
ASML PAS 5000 / 55 is a state-of-the-art wafer stepper equipment designed for production of semiconductor wafers. Developed by ASML, a leader in the semiconductor equipment realm, PAS 5000 / 55 offers unparalleled speed and precision. The stepper contained in ASML PAS 5000 / 55 system consists of an automated optical engine which allows for lithography over an 8" wafer. The motorized motion control systems allow for maximum accuracy, ensuring that the wafer will maintain the same cyclindrical shape and surface quality at high speeds. Additionally, the sub-micron positioning offers even finer resolution than traditional steppers. PAS 5000 / 55 is specifically designed to package ICs such as DRAMs, SRAMs, Flash, and ASICs. To ensure a consistent and reliable production, the unit is outfitted with two linear axes which allow for X/Y working parameters, with a wide range of exposure methods. ASML PAS 5000 / 55 also features a dynamic focus feature that adjusts the focal point of the scanning for optimal accuracy and performance. This feature helps reduce the number of defects common in production processes, and also helps speed up production times. The machine is powered by an advanced digital control board, which allows for precision control of all production steps, from exposure to image development. The control board also allows for quick processing speeds of up to 12MUX, and a scan rate of 2.13 microns per clock cycle. Finally, PAS 5000 / 55 is equipped with highly advanced software, which enables engineers and operators to control and monitor each production step with extreme accuracy and ease. This software also makes setup and maintenance a breeze, by allowing for quick troubleshooting and maintenance of the tool.
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