Used ASML PAS 5000 / 55 #9068441 for sale
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ID: 9068441
i-Line Stepper
Software version: 3.1.0
Reticle size: 5"
Lens Data:
Wave length: 365nm (i-line)
NA: 0.48
Resolution: 0.50µm
Field Size Diameter: 21.2mm
Max X: 15mm
Max Y: 19mm
Usable Depth of focus: ≥1.2µm at specified resolution of 0.50µm with 10% CD Control and > 83° wall angle
Distortion: 100nm
Currently stored in a cleanroom.
ASML PAS 5000 / 55 wafer stepper is an advanced lithography equipment used in the manufacturing of semiconductor devices. It is a precision imaging device, capable of producing patterns on semiconductor wafers with subpixel accuracy. The machine features the proprietary Synchroscope alignment system, a unique technology that combines the alignment of multiple images taken by a CCD camera and a scanning electron microscope, allowing for precise overlay of the multiple images. PAS 5000 / 55 utilizes a high NA (numerical aperture) projection unit, enabling the machine to produce patterns with small feature sizes. In addition, the tool has an automated asset for managing and optimizing the exposure process, ensuring precise imaging from design to production. This model is also capable of overlapping exposures, which allows for faster production times and more efficient semiconductor device production. ASML PAS 5000 / 55 also incorporates a variety of advanced lithography features, including wafer alignment and image selection. The machine can be configured to use either dark field illumination or bright field illuminations, and is equipped with a full range of lenses and aperture masks. The equipment can be programmed to perform alignment of the wafer and a laser autofocus system is included to ensure accurate and precise imaging. This unit can handle multiple wafer sizes, from 2-inch to 300-mm, and can be used in both single and double-side processing. The machine also features a built-in monitoring machine which includes inspection and metrology functions, and an automated markerects tool that helps ensure alignment between the substrate and the mask. An in-line inspection asset is also included in the package, allowing for rapid wafer correction and pattern recognition. PAS 5000 / 55 wafer stepper is a robust, reliable and advanced lithography model for semiconductor manufacturing. It provides precision and repeatable lithography results for various device sizes, and is designed to deliver high productivity and improved yields. This equipment is suitable for small and large production runs, from prototyping to high volume manufacturing.
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