Used ASML PAS 5000 / 55 #9241173 for sale

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Manufacturer
ASML
Model
PAS 5000 / 55
ID: 9241173
Stepper.
ASML PAS 5000 / 55 is a wafer stepper, designed for the production of integrated circuits. It is used for photolithography, an important step in the semiconductor manufacturing process. The equipment is capable of producing superior micro-component yields, and has a standard production cycle time of just over one minute. PAS 5000 / 55 uses a programmable motion controller to rapidly position and align two high-resolution projectors, which together expose areas of a semiconductor wafer to light using digitally programmed patterns. This operation is known as stepping, and involves projecting multiple overlapping exposure patterns with nanometer-level accuracy over the entire semiconductor wafer. Its patented PAS E+ light engine architecture enables ASML PAS 5000 / 55 to store up to four exposure patterns in its onboard memory, and execute them in sequence over a single exposure cycle. This dramatically reduces the time required to complete the entirety of the photolithography process, and allows manufacturers to reduce the cost of production by increasing throughput. PAS 5000 / 55 is also capable of multi-layer exposure, allowing for the production of more sophisticated integrated circuits. The system is capable of exposure operations in fields such as Flash memory, high-speed logic circuits, DRAM and dynamic random access memory. The size of the wafers which ASML PAS 5000 / 55 can process varies between 6 and 12 inches in diameter, depending on the configuration of the unit. Its specifications also include a stage travel resolution of 0.1 nanometers, a step-down accuracy of 0.5 percent, a repeatability of 0.2 nanometers, and a Backlash Error Reduction(BER) of 0.7 nanometers. PAS 5000 / 55 is equipped with a range of safety features to ensure that its operation is safe, and that the integrated circuits it produces are of the highest quality. These include automatic interlock systems, automatic focus and alignment systems, continuously measured mark position and inspection parameters, and Auto-FPR feedback control to maintain optimum imaging conditions. ASML PAS 5000 / 55 is a state-of-the-art machine for semiconductor photolithography, and is suitable for use in factories that require superior micro-component yields and reduced production time. It is a reliable and user-friendly tool, and is becoming increasingly common in the semiconductor industry.
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