Used ASML PAS 5000 / 55 #9245465 for sale

ASML PAS 5000 / 55 is a state-of-the-art wafer stepper equipment designed to automate the production of integrated circuits. The system utilizes a Scanning Electron Microscope to inspect and locate features on the wafer before and after exposure of a photoresist film. It enables precise positional alignment of stepper components and can perform concurrent testing of photomasks. PAS 5000 / 55 consists of a mainframe computer and several software, hardware and optical components. The unit includes a Mask Alignment Table which enables precise positioning of the photomask relative to the wafer for accurate feature imaging. A pair of exposure heads equipped with laser interferometers is also included to align the optical components and ensure optimal alignment during exposure. In addition, ASML PAS 5000 / 55 features a Scanning Electron Microscope (SEM) head with a stage for inspecting and positioning wafers prior to and after the process. The machine's software suite is designed to integrate all components, and can operate independently of the mainframe computer. PAS 5000 / 55 is equipped with an advanced air bearing tool, and is designed to be able to operate in an atmospheric or vacuum environment. The asset utilizes a specialized optical model to direct and control the various optical components, ensuring accuracy of alignment and imaging. The photomask is placed onto a special adapter which is connected to the two main exposure heads. A pair of vibration isolation components is also included in the equipment, allowing for maximum image stability. ASML PAS 5000 / 55 is capable of a variety of photomask and wafer sizes, and is capable of accommodating production of up to 300mm wafers.Integrated sensors within the tool enable real-time adjustment and process monitoring, allowing it to accurately improve process stability between wafers for consistent performance. By utilizing PAS 5000 / 55, users are able to achieve imaging of integrated circuits with high precision. The system is quick and efficient, and its software and hardware components are designed to ensure reliable operation of the unit and ensure that the process yields consistent, accurate results.