Used ASML PAS 5000 / 55A #293817881 for sale

ASML PAS 5000 / 55A
Manufacturer
ASML
Model
PAS 5000 / 55A
ID: 293817881
i-Line stepper Numerical Aperture (NA): 0.48 Resolution: 500 nm DCO: 100.
ASML PAS 5000 / 55A is a wafer stepper used in the fabrication of integrated circuits on semiconductor wafers. It is a high-end lithography machine that employs an 'overscan'/'underscan' technique and a wide range of advanced features to produce optimal image quality. ASML PAS 5000 / 55 A utilizes a step-and-repeat lithography method involving a fixed dual-axis stage based equipment. It features a high-speed positioning mechanism with a total maximum speed of 500mm/s for large-format board alignment accuracy. It is also equipped with a high resolution optical positioning system, capable of resolution 0.1 microns and accuracy of 0.5 microns. PAS 5000 / 55A features an overhead plasma or quad energy source which is ideal for masking and exposure. It features a low thermal budget in order to ensure optimum temperature for the exposure process. The overhead optical unit also features wide-ranging adjustable parameters, setting both input and output power level to optimize the resolution and uniformity of the embedded layer. In terms of optics, PAS 5000 / 55 A is fitted with a telescopic optical machine and high resolution optics and lenses, capable of imaging up to 0.7 microns. It also includes a laser interferometer tool for fringe pattern measurement, improving the inherent linearity of the asset and enabling accurate alignment targeting. ASML PAS 5000 / 55A is composed of a powerful Xenon illumination source and optimized optical array. It is also equipped with a versatile mask writer and automated exposure optimization systems. Finally, an intuitive software package is included for controlling and managing the machine. Overall, ASML PAS 5000 / 55 A is an efficient, high-performance wafer stepper providing cutting-edge lithography technology and advanced model architecture. It is able to meet the requirements of advanced-level semiconductor processes and is essential for the production of leading-edge integrated circuits.
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