Used ASML PAS 5500 / 125E #9188743 for sale

ASML PAS 5500 / 125E
Manufacturer
ASML
Model
PAS 5500 / 125E
ID: 9188743
Wafer Size: 8"
Vintage: 2011
i-Line stepper, 8" 2011 vintage.
ASML PAS 5500 / 125E is a '6th generation' high-end commercial step and scan equipment developed by ASML, a leader in lithography tools and services. This system integrates the best of both worlds - the advanced 6th-generation stepper technology which promises exceptional imaging performance, lithography control and precision alignment and the PAS (PAS 5500 / 125E) scan module from the earlier generations, which enables high throughput and accuracy. ASML PAS 5500 / 125E features a krypton fluoride (KrF) excimer laser, which is capable of producing an arc of light up to 85 millimeters (mm) in diameter and a wavelength of 248 nanometers (nm). This laser produces a finely collimated beam of light that is able to illuminate a large area, making it ideal for applications that require precision and accuracy, such as producing microchips. The unit features the most advanced 6th generation technology, including advanced Dose Mapping (DMA) and advanced Resist Control (RCA), which are essential for controlling the exposure dose of the photoresist, as well as managing the resolution and contrast in the photomasks. Furthermore, the new 6th generation machine offers improved in-die alignment, using a combination of software-controlled laser alignment systems and display monitors. These advanced features result in an increase in productivity and precision. In addition, PAS 5500 / 125E utilizes ASML advanced 'spiral-scanning' technology to transfer the image from a printed mask onto the semiconductor wafer. In this process, the device illuminates a spiral of 'spatial frequency' spots onto the wafer, developing a topographical map that the device is continuously able to readjust. This ensures that the imaging is distortion-free throughout the scan, achieving a uniform resolution throughout the full semiconductor wafer. ASML PAS 5500 / 125E also features an auto-focus tool, which constantly keeps track of the wafer's position, helping to maintain uniform, clear imaging. Additionally, the asset includes an environmental synchronization mechanism, which ensures a consistent temperature and humidity in the model's chambers. This helps to prolong the equipment's overall lifespan, and maintain a consistent output. To sum up, PAS 5500 / 125E is a high-end commercial stepper system equipped with the most advanced 6th generation stepper technology and ASML PAS 5500 / 125E scan module. It offers high imaging precision and accuracy through advanced features such as dose mapping, resist control, in-die alignment, spiral-scanning, auto-focus and an environmental synchronization mechanism.
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