Used ASML PAS 5500 / 200 #293817870 for sale

ASML PAS 5500 / 200
Manufacturer
ASML
Model
PAS 5500 / 200
ID: 293817870
i-Line stepper Numerical Aperture (NA): 0.48-0.60 Resolution: 350 nm DCO: 50 Throughput (WPH): 80.
ASML PAS 5500 / 200 is a top-of-the-line wafer stepper manufactured by the Netherlands-based Dutch technology firm ASML. It is primarily used by semiconductor and integrated circuit manufacturers in the process of photolithography, wherein a light pattern is projected onto a substrate such as silicon wafers in order to reproduce precise motifs down to nanometer scales. The stepper can line-up, expose, and inspect electrical components onto a wafer in less than seven seconds. It has a system accuracy of 0.4 micrometres and works with a numerical aperture of 0.7. The machine features a bright, adjustable source spectrum from 254 to 365nm, with a selectable dose from 0.1 to 2500 mj/cm2, and 0.2 to 500 ms exposure times. ASML PAS 5500/200 has two external vibration dampers, making it suitable for complex optical devices, as well as a fast reticle and wafer stage, resulting in other faster and more accurate processes. It is capable of handling wafers of up to 200mm in size. PAS5500 / 200 is equipped with an automated control system that is designed to reduce operator time and improve workflow results. This system is capable of automatically correcting for image distortion and other errors, allowing for the use of a single layer alignment accuracy of 2 microns and a multi-layer alignment accuracy of 1 micron, as well as temperature control from -10 to 50 degrees Celsius. From an operational standpoint, the stepper is quite user-friendly, requiring a minimum of technical knowledge to operate it properly. It is equipped with a touchscreen graphical user interface, computerized job set-up parameters, and a wide range of diagnostic data that can be readily accessed. Overall, ASML PAS5500 / 200 is a highly regarded and reliable wafer stepper that provides secure, accurate, and cost-effective photolithography solutions to semiconductor and integrated circuit manufacturers. The machine's user-friendly interface, impressive accuracy, and excellent motion control capabilities ensure that it will remain an essential piece of equipment inside the production lines of such enterprises for years to come.
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