Used ASML PAS 5500 / 200 #9095592 for sale

ASML PAS 5500 / 200 is an high-end wafer stepper that combines a large field of view with advanced imaging and pixel-level alignment accuracy. This stepper offers high-resolution imaging and enhanced process performance, making it perfect for semiconductor fabrication applications. ASML PAS 5500/200's total field of view is 43 mm, providing a full range of substrate imaging. The stepper's maximun resolution is 5.6 microns, with a high-precision line-width resolution of 1.5 microns. Additionally, PAS5500 / 200 provides advanced pixel-level alignment accuracy with 21 nm Level of accuracy with Edge Overlap. This allows for precise printing of critical pattern layers with maximum process repeatability. The stepper comes with a variety of features and controls that make it ideal for sophisticated and delicate semiconductor fabrication processes. PAS 5500/200 features Y-axis Scanning for scanning of small patterns, ensuring maximum accuracy in feature size and position during patterning. The stepper also features variable dose mode for precise, non-uniform dose distributions, reducing total exposure dose and energy consumption. The stepper is built with a durable air-bearing frame and scanner head, providing maximum system stability and also comes with a symmetric design to maximize motion accuracy. ASML PAS5500 / 200 also includes a powerful host computer that provides powerful application control, support for a variety of user interfaces, as well as manual control of optical system parameters. Overall, PAS 5500 / 200 wafer stepper is an advanced, high-end imaging and alignment solution for precision semiconductor fabrication applications. With its quality imaging capabilities, enhanced process performance, and integrated control system, users can enjoy efficient and accurate performance.