Used ASML PAS 5500 / 200 #9232850 for sale
URL successfully copied!
ASML PAS 5500 / 200 is a wafer stepper used for lithographic patterning in the semiconductor manufacturing industry. This tool is designed to help create patterns in semiconductors, enabling manufacturers to create transistors, memory, and microprocessors with aggressive line widths of 0.10 micrometers or smaller. The stepper is composed of four main components: an acceleration unit, control unit, optics unit, and a mobile platform unit. The acceleration unit controls the coordinates of the wafer, the control unit runs the program associated with the lithographic pattern, the optics unit is responsible for imaging the pattern onto the wafer, and the mobile platform unit is responsible for moving the wafer in the X and Y directions. All four units are connected together and each unit has a number of sensors and actuators responsible for feedback information. The optical equipment of ASML PAS 5500/200 has a unique combination of lenses and mirrors that are designed to image onto the wafer's surface. A wafer is held in place during exposure by a sample holder, aided with the help of an A4 (Advanced Alignment Mode) system. The four components combined together guarantee accuracy and speed to a position of a fraction of a micron. A Vacuum Column forms the extension of the Vacuum Chamber, which creates a low pressure environment in which the wafer is held, ensuring excellent placement, high-quality imaging, and greater pattern fidelity. The stepper has a 6-inch programmable wafer size, making it ideal for smaller-scale integrated circuit production, as well as a maximum exposure time of 5 seconds. Its spotting speed is significantly faster than competitors' models, and the PAS 5500 is capable of producing more accurate results as well. Additionally, the stepper is equipped with a reverse-travel focus profile algorithm that can accurately model the behavior of the PAS 5500 in response to vector changes to provide better focus control and enhanced stability during integration and exposure phases. PAS5500 / 200 comes with an integrated wafer centering and tracking unit, assuring wafers to be precisely positioned over the focus point of the machine. This makes it possible to process wafers of any size, even those with non-standard sizes that may be difficult to engineer. Furthermore, PAS 5500 / 200 has an advanced recipes modes which enables precision patterning in the micro-fabrication process and high-end lithography. Overall, PAS 5500/200 is a highly precise wafer stepper that has been designed to improve yields, increase throughput and reduce production times. Its use of sophisticated technologies and components make it the ideal choice for manufacturers looking for reliable, accurate, and high-performance lithography.
There are no reviews yet