Used ASML PAS 5500 / 200B #293804503 for sale

ASML PAS 5500 / 200B is a type of wafer stepper, also known as a stepper track lithography equipment. It is used at photolithography facilities to create circuits for integrated circuits for the semiconductor industry. The system achieves this through a combination of light and masks which lay down the pattern on the wafer's surface. PAS 5500 / 200B has a total stepper size of 2 meters by 1.5 meters and is capable of stepping a wafer of up to 200 mm in diameter, while achieving 1.2 μm registration accuracy in the x and y direction. It uses high resolution, broadband illumination with a photon energy ranging from 246 to 1064 nm, and an optical zoom range of 16x. The unit can provide various numerical apertures ranging from 0.45 to 1.35. With this range, it can create a variety of feature sizes and over scan capabilities with accuracy range from 150 nm to 30 μm and depth of focus range from 8 μm to 28 μm respectively. ASML PAS 5500 / 200B utilizes a 3-axis, closed-loop control machine that synchronizes the columns and allows for high-resolution pattern printing. Its two velocity motorized axes are driven by Precision Ball Screws, capable of providing high positioning accuracy in a fast and reliable manner. The tool has a high resolution, position feedback asset and a closed-loop, humidity control feature as well. The model is capable of aggressive overlay control and fast throughput, allowing for an accelerated volume production cycle. Its built-in SoftRecipe software provides a user-friendly and intuitive user interface for easy operation and maintenance. In addition, it provides both graphical features as well as advanced statistical and geometrical-based analysis functions. Finally, PAS 5500 / 200B incorporates a comprehensive standard safety protocol that helps minimize the risk of safety-related events. Each of its components is designed and tested according to the industry's highest safety standards, featuring state-of-the-art safety interlocks, functioning with the latest safety control mechanisms. With such advanced safety features, ASML PAS 5500 / 200B is a reliable and highly efficient wafer stepper track lithography equipment.